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General Information
Center for Functional Nanomaterials
An Office of Science User Facility
Nanofabrication Resources
Cleanroom Overview (pdf)
- Tool list and tool related documentation
- Online cleanroom training course
- Facility Online Manager (FOM) website
- FOM manual
- Cleanroom Experimental Safety Review (ESR) 7: nanopatterning and characterization
- Cleanroom ESR 8: thin film processing
- Cleanroom ESR 30: Oxford Reactive Ion Etcher-C
- CFN Operations Safety Awareness (COSA) form for cleanroom
- Cleanroom Orientation/Protocols
- Electronic Chemical Recipe/Waste Log instructions
- Request form for off-hours access (first time only, renewals are done via email)
Electronic Characterization Laboratory (1L35)
- 1L35 Overview (pdf) | List of electronic instruments (pdf)
- 1L35 Experimental Safety Review (ESR) document
- CFN Operations Safety Awareness (COSA) form (ESR #10)
| Probe station | Status | Primary contact | Backup contact | Booking calendar | Booking rules | Electronic login (at tool) |
SOP |
|---|---|---|---|---|---|---|---|
| Room temperature/general purpose Signatone CM-170 | up | Camino | Nam | FOM | no | yes | no |
| PV characterization Rucker and Kolls | up | Nam | Camino | yes | no | yes | yes |
| Cryogenic (4 K)/magnetic field LakeShore HFTTP4 | up | Camino | Nam | FOM | no | yes | no |
| High temp (500 °C) MBE-Komponenten A0500 | up | Camino | FOM | no | yes | no | |
| Wedge bonder Kulicke & Soffa Model 4526 | up | Camino | FOM | no | yes | no |
booking calendar: yes = need to reserve tool time in
calendar before using tool
booking rules: yes = specific rules exist for reserving
tool time
electronic log-in (at tool): yes = need to log in (at
tool) actual start and end time of tool usage
SOP = standard operating procedure (basic instructions)
