Nanofabrication Group

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lab area tool status primary
contact
backup
contact
training
schedule
booking
calendar
booking
rules
SOP
thin-film processing cleanroom up Wright Lu (COSA)
Tues
10:30-11 AM
no no  yes
Lesker sputterer up Lu Stein Tues
11-1 PM
yes no  yes
Lesker e-beam evaporator up  Lu Stein Tues
11-1 PM
yes yes yes
Lesker thermal/e-beam evaporator up Stein Camino   yes no yes
Oxford deep Si etcher up Lu  Stein Thurs
1:30-4 PM
yes no  no 
Oxford-C metal etcher up Lu    Lu  FOM yes  yes 
Trion PECVD up Lu Stein Lu yes no  no 
Trion RIE up Lu  Stein Lu  yes no  no 
plasma asher up Lu  Stein Lu  no no  yes
process characterization & Helios dual-beam system Dektak stylus profiler up Camino Stein Camino FOM no  no 
Zygo non-contact profiler up Camino Stein Camino FOM no  no 
reflectometer up Lu  Camino Lu  no no yes
diamond scriber up Camino Stein Camino FOM no yes
sputter coater
(for SEM)
up Camino Stein Camino no no  no 
Nikon optical microscope up Camino Stein Camino no no  no 
Helios up Camino Stein Wed
10-12 PM
FOM yes yes
class 100 & lithography
Brewer spinner up Stein Lu Stein no no  no 
Suss coater up Stein Lu Stein no no  no 
Nikon microscope (motorized stage) up Stein Lu Stein no no  no 
Zeiss optical microscope up Stein Lu Stein no no  no 
Suss MJB3
mask aligner
up Lu Stein Lu yes no  yes
Suss MA6
mask aligner
up Lu Stein Lu yes no  no
nanoimprinter up Stein Lu Stein yes no  no 
JEOL JBX6300-FS up Stein Lu Wed
1-3 PM
yes yes no

booking calendar: yes = need to reserve tool time in calendar before using tool

booking rules: yes = specific rules exist for reserving tool time

SOP = standard operating procedure (basic instructions)

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Last Modified: March 4, 2013
Please forward all questions about this site to: Fernando Camino.


DOE, Office of Science One of ten national laboratories overseen and primarily funded by the Office of Science of the U.S. Department of Energy (DOE), Brookhaven National Laboratory conducts research in the physical, biomedical, and environmental sciences, as well as in energy technologies and national security. Brookhaven Lab also builds and operates major scientific facilities available to university, industry and government researchers. Brookhaven is operated and managed for DOE's Office of Science by Brookhaven Science Associates, a limited-liability company founded by the Research Foundation for the State University of New York on behalf of Stony Brook University, the largest academic user of Laboratory facilities, and Battelle, a nonprofit, applied science and technology organization.

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