Center for Functional Nanomaterials: Nanofabrication Group

Nanofabrication Group

lab area	tool	status	primary contact	backup contact	training schedule	booking calendar	booking rules	SOP
thin-film processing	cleanroom	up	Stein	Lu	(COSA) Tues 10:30-11 AM	no	no	yes
	Lesker sputterer	up	Lu	Stein	Tues 11-1 PM	yes	no	yes
	Lesker e-beam evaporator	up	Lu	Stein	Tues 11-1 PM	yes	yes	yes
	Denton thermal evaporator	up	Lu	Stein	Lu	yes	no	yes
	Oxford deep Si etcher	up	Lu	Stein	Thurs 1:30-4 PM	yes	no	no
	Trion PECVD	up	Lu	Stein	Lu	yes	no	no
	Trion RIE	up	Lu	Stein	Lu	yes	no	no
	plasma asher	up	Lu	Stein	Lu	no	no	yes

process characterization & Helios dual-beam system	Dektak stylus profiler	up	Camino	Stein	Camino	no	no	no
	Zygo non-contact profiler	up	Camino	Stein	Camino	yes	no	no
	reflectometer	up	Lu	Camino	Lu	no	no	yes
	ellipsometer	up	Camino	Stein	Camino	no	no	no
	diamond scriber	up	Camino	Stein	Camino	no	no	yes
	sputter coater (for SEM)	up	Camino	Stein	Camino	no	no	no
	Nikon optical microscope	up	Camino	Stein	Camino	no	no	no
	Helios	up	Camino	Stein	Wed 10-12 PM	yes	yes	yes

class 100 & lithography
	Brewer spinner	up	Stein	Lu	Stein	no	no	no
	Suss coater	up	Stein	Lu	Stein	no	no	no
	Nikon microscope (motorized stage)	up	Stein	Lu	Stein	no	no	no
	Zeiss optical microscope	up	Stein	Lu	Stein	no	no	no
	Suss MJB3 mask aligner	up	Lu	Stein	Lu	yes	no	yes
	Suss MA6 mask aligner	up	Lu	Stein	Lu	yes	no	no
	nanoimprinter	up	Stein	Lu	Stein	yes	no	no
	JEOL JBX6300-FS	up	Stein	Lu	Wed 1-3 PM	yes	yes	no

booking calendar: yes = need to reserve tool time in calendar before using tool

booking rules: yes = specific rules exist for reserving tool time

SOP = standard operating procedure (basic instructions)

Last Modified: January 18, 2012
Please forward all questions about this site to: Fernando Camino.