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Site Details Other Information Basic Energy Sciences Directorate DOE/BES Nanoscale Science Research Centers |
Phone:631-344-4773
Ming LuElectronic Materials: NanofabricationDr. Ming Lu has recently joined the CFN after finishing his postdoctoral appointment at the Center for Nanoscale Materials at Argonne National Laboratory. Ming holds a Ph.D. degree in Physics from SUNY Stonybrook. His research interests include high-resolution lithography and fabrication of thin-film nanostructures. Ming joins the Nanofabrication Facility Staff in the Electronic Nanomaterials group, where he will oversee the facility plasma etch tools and research fabrication methods combining high-resolution lithography and high-aspect-ratio etching.
Last Modified: October 10, 2008 |