Electronic Materials: Nanofabrication
Dr. Ming Lu has recently joined the CFN after finishing his postdoctoral appointment at the Center for Nanoscale Materials at Argonne National Laboratory. Ming holds a Ph.D. degree in Physics from SUNY Stonybrook. His research interests include high-resolution lithography and fabrication of thin-film nanostructures. Ming joins the Nanofabrication Facility Staff in the Electronic Nanomaterials group, where he will oversee the facility plasma etch tools and research fabrication methods combining high-resolution lithography and high-aspect-ratio etching.
Last Modified: April 16, 2013