Options for Greenhouse Gas Abatement

from Exhaust Streams

Vasilis Fthenakis

Abstract

The semiconductor industry is committed, voluntarily, to minimize emissions of perfluorocarbons from their facilities, due to concerns of PFCs contributing to global warming. The PV industry is currently using PFCs in only a few applications but their use may increase as plasma etching is projected to substitute wet etching applications. This report is examining different alternatives for PFC replacement, treatment and recycling. It is concluded that treatment (abatement) is the only viable short-term option. Three abatement options, which have been tested for use in semiconductor facilities, are reviewed and their performance and costs are compared. This study shows that effective abatement options are available, at reasonable cost, to the PV industry.

Last Modified: June 18, 2008
Please forward all questions about this site to: Vasilis Fthenakis

One of ten national laboratories overseen and primarily funded by the Office of Science of the U.S. Department of Energy (DOE), Brookhaven National Laboratory conducts research in the physical, biomedical, and environmental sciences, as well as in energy technologies and national security. Brookhaven Lab also builds and operates major scientific facilities available to university, industry and government researchers. Brookhaven is operated and managed for DOE's Office of Science by Brookhaven Science Associates, a limited-liability company founded by Stony Brook University, the largest academic user of Laboratory facilities, and Battelle, a nonprofit, applied science and technology organization.

Privacy and Security Notice  | Contact Web Services for help