Options for Greenhouse Gas Abatement

from Exhaust Streams

Vasilis Fthenakis

Abstract

The semiconductor industry is committed, voluntarily, to minimize emissions of perfluorocarbons from their facilities, due to concerns of PFCs contributing to global warming. The PV industry is currently using PFCs in only a few applications but their use may increase as plasma etching is projected to substitute wet etching applications. This report is examining different alternatives for PFC replacement, treatment and recycling. It is concluded that treatment (abatement) is the only viable short-term option. Three abatement options, which have been tested for use in semiconductor facilities, are reviewed and their performance and costs are compared. This study shows that effective abatement options are available, at reasonable cost, to the PV industry.

 

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Last Modified: June 18, 2008
Please forward all questions about this site to: Vasilis Fthenakis