Principles and
Applications of Angle- and Spatially-Resolved EELS
Marek Malac, Carol Wang, Ray Egerton
Electron energy loss
spectroscopy (EELS) has become a mainstream characterization method. It provides
access to high spatial resolution analytical and electronic properties
information in a TEM. When combined with the imaging and diffraction
capabilities of a TEM a nanomaterial can be characterized in great detail. The
aim is to review the principles and implementation of angle- and
spatially-resolved EELS and its applications to study of material properties at
nanoscale. Fundamental limits imposed on momentum and spatial resolution will be
discussed.