Precision Engineering and Nanopositioning Team
Laser Interferometer (Attocube, SIOS): resolution better than 1 nm, measurement speed over 2 m/s at 10MHz bandwidth, working distance up to 10 m
Lion Precision Capacitive Displacement Sensors: in-vacuum/ambient, resolution better than 2 nm, working range between 0.25 mm and 6 mm
Keyence Optical Micrometers: resolution better than 1 μm, working distances between 30 and 120 mm
Sphere of confusion measurement system: cylindrical/spherical artifacts, better than 10 nm accuracy
Vibration measurements and characterization system: assortment of accelerometers, piezo-shakers and processing software
Test vacuum chamber: electrical/optical feedthrough for thermometers, laser interferometers, capacitive displacement sensors; LHe/LN cryostat for thermal performance/characterization of equipment
JEOL JCM-6000PLUS NeoScope Benchtop SEM: automatic image formation after sample introduction within 3 minutes; high resolution (60,000X) and large depth of field
Hirox RH-2000 3D Microscope: visualization and characterization of 3D objects with sub mm resolution
Nikon Eclipse LV150N optical microscope with 5x, 20x and 50x objective lenses
Signatione 1160 series probe station with three S-926 probes
R&D machine shop: milling machine, lathe, bead blasting, ultrasonic cleaning
