Assembly of sensors and M-substrates

Procedure

The M-substrate is assumed to be fully tested and operational before it is glued to the sensors. The substrate(s) are aligned under a microscope in a frame placed on top of the gluing station with respect to reference marks. Two sensors are place on the vacuum jig on the central x/y/phi stages. They provide movement in x and y, and rotation. Using these stages, the sensor is aligned with respect to the bonding pads of the M-substrate.

The precision along the pad row should be equal or better than 25mm. After proper alignment, the glass spacer is glued to M-substrate and sensors and provides the mechanical connection between them. The glue has to cure for several hours.

Finally the vacuum is released and vacuum jigs are lowered and shifted to the position on the remaining sensor(s). The vacuum jigs are adjusted in height for the remaining sensors and the alignment and gluing procedure is repeated.

The time to assemble one module with sensors is estimated to be 1 day. This does not include time for an alignment measurement of the finished module. Depending on the precision of the moving stage and its readout capabilities the gluing station may be used also for the alignment measurement (position of sensors with respect to each other and to the M-substrate reference marks)

Equipment

• Motorized x-y stage (10 x 10 inch range) with driver and position readout system (precision (linearity and reposition) in x-y < 5mm)
• Digital display of the actual position (readout to PC desired)
• rigid table
• rotation and sliding system for the alignment columns
• 2 alignment columns for the sensors (x-y-phi) with vacuum jigs
• high quality microscope (amplification 100x)
• light source
• 2 precision frames for M-substrate support and alignment
• vacuum pump and control

Status of equippment (as of 5/19/97)

• 13x13 mm XY stages (2pc.) @ MIT
• big rotary stage (1pc) (please see the drawing of base dimensions, top and bottom view ) @ MIT
• small rotary stage (2pc.) and all micro screws @ Krakow
• linear motion ball slide (1 pc.) @ Krakow
• 250 x 250 mm XY stage + controler + display (option1) to be ordered in week 22
• dual stable rod system for microscope to be order week 22 ????