Silicon Pad Sensor Technology

Double Metal,

Single sided,

AC coupled,

Polysilicon biased

metal 1

metal 2

p+ Implant

n+

Polysilicon

Drain Resistor

bias bus

signal lines

vias

300um 5000kOhm nSi

0.2um ONO

1.2um ONO

Thin ONO

Thick ONO

PN junction

Polysilicon

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