Phobos Silicon Sensors
VF.D. < 70 V
Ileak = 1 - 5 mA
Rpoly > 1 MW
CSOG = 40 +/- 2 pF/mm2
CONO = 170 +/- 5 pF/mm2
Bulk 320+/- 30 mm
1st metal 5000 A
2nd metal 20000 A
SOG 12000 A
ONO 3200 A
The electric characteristic of each component
can be measured from test keys
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