Center for Functional Nanomaterials Seminar

Metal-organic frameworks (MOFs) hold promise as gas separation membranes due to their tunable permeation properties enabled by the structural diversity stemming from the plethora of available metal/organic linker combinations [1]. Although relatively rapid progress for highly selective MOF membranes has been achieved, reliable and scalable thin film processing remains a challenge. In this talk, MOF deposition methods based on vapor phase processing and use of electron-beam-, X-ray- and plasma-induced modifications [2-8] will be discussed. These methods establish a new materials processing paradigm with potential uses beyond thin film separation membranes. A new potential application of crystalline and amorphous MOF films for lithography used in the fabrication of microelectronic devices will also be presented [9-14]. REFERENCES 1. Annual Review of Chemical and Biomolecular Engineering 13, 529-555 (2022) Lee D.T., et. al. Zeolitic Imidazolate Framework Membranes: Novel Synthesis Methods and Progress Towards Industrial Use https://doi.org/10.1146/annurev-chembioeng-092320-120148 2. Science 361, 1008-1011 (2018) Ma X., et. al. Zeolitic Imidazolate Framework Membranes made by Ligand-Induced PermSelectivation https://doi.org/10.1126/science.aat4123 3. Angewandte Chemie Int. Ed. 58, 16390-16394 (2019) Eum K., et. al. ZIF-8 Membrane Separation Performance Tuning by Vapor Phase Ligand Treatment https://doi.org/10.1002/anie.201909490 4. Chemical Communications 60, 9316-9320 (2021) Miao Y., et. al. Electron Beam Induced Modification of ZIF-8 Membrane Permeation Properties https://dx.doi.org/10.1039/d1cc00252j 5. Angewandte Chemie Int. Ed. 60(17), 9316-9320 (2021) Hayashi M., et. al. ZIF-8 Membrane Permselectivity Modification by Manganese (II) Acetylacetonate Vapor Treatment https://doi.org/10.1002/anie.202100173 6. AIChE Journal 67(8), AIC17305 (2021) Zhang L., et. al. Numerical Simulation of Atomic Layer Deposition for Thin Deposit Formation in Mesoporous Substrate https://doi.org/10.1002/aic.17305 7. ACS Applied Materials & Interfaces 14(16), 19023-19030 (2022) Dorneles de Mello M., et. al. In situ Tracking of Non-Thermal Plasma Etching of ZIF-8 Films https://doi.org/10.1021/acsami.2c00259 8. Industrial & Engineering Chemistry Research 62(23), 9335-9347 (2023) Yuchen Y., et. al. CFD Simulation of the Dosing Behavior within the Atomic layer Deposition System https://doi.org/10.1021/acs.iecr.3c01151 9. Angewandte Chemie Int. Ed. 58, 16390-16394 (2018) Conrad S., et. al. ZIF-8 Controlling Dissolution and Transformation of Zeolitic Imidazolate Frameworks by using Electron-Beam-Induced Amorphization https://doi.org/10.1002/anie.201809921 10. Chemistry of Materials 33(14), 5681-5689 (2021) Gosh S., et. al. Two Distinct Stages of Structural Modification of ZIF-L MOF under Electron-Beam Irradiation https://doi.org/10.1021/acs.chemmater.1c01332 11. Chemistry of Materials 33, 754-760 (2021) Miao Y., Tsapatsis M. Electron Beam Patterning of Metal-Organic Frameworks https://dx.doi.org/10.1021/acs.chemmater.0c04204 12. Nature Communications 13(1), 420 (2022) Miao Y., et. al. Solvent-Free Bottom-up Patterning of Zeolitic Imidazolate Frameworks https://doi.org/10.1038/s41467-022-28050-z 13. Nature Materials In Press (2023) Liu Q., et. al. Nanometer-Thick Crystalline and Amorphous Zeolitic Imidazolate Framework Films for Membrane and Patterning Applications 10.21203/rs.3.rs-2666142/v1 14. Advanced Functional Materials Accepted (2023) Corkery P., et. al. Zinc-Imidazolate Films as an All-Dry Resist Technology https://doi.org/10.26434/chemrxiv-2023-sl35t Bio: Michael Tsapatsis is a Bloomberg Distinguished Professor at Johns Hopkins University (JHU). Before joining JHU (September 1, 2018) he was on the faculty of the Department of Che