Friday, August 4, 2006, 9:30 am — Seminar Room, Bldg. 725
I apply micro- and nanoscale engineering methods to a number of problems. First, I construct high efficiency blazed gratings, with efficiencies as high as 88%. Next, I explore the fabrication of minimal zone plate arrays for lithography applications. For a photon energy of 1.4keV , we obtain FWHM of less than 40nm, with a mask to object gap of greater than 10 microns. Finally, we study some micro-fluidic structures, and the deep RIE required to produce them.
Hosted by: K. Evans-Lutterodt
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