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Technologies Available for License

Category: advanced materials

2021-015: Fabrication of single crystalline body-centered-cubic (bcc) tantalum thin films on a-plane sapphire (α-Al2O3) substrates

Invention: 2021-015

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Summary

Describes a method of producing epitaxial α-tantalum thin film on a-plane sapphire substrate that can be used to fabricate transmon qubit devices.

Tags: device

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