QPress Cluster Tool

The cluster tool enables the robotic transfer of substrates through a series of integrated processing modules. It includes capabilities such as high-temperature annealing (in either vacuum or argon atmosphere), oxygen plasma treatment, and electron beam evaporation. Additionally, a sample library is incorporated for the long-term storage of substrates and intermediate samples.

Designed to interface seamlessly with QPress-specific modules, the cluster tool supports fully automated and programmable routing of samples through all stages of preparation, synthesis, and processing. This level of automation streamlines the fabrication of layered materials and significantly enhances reproducibility and throughput in 2D materials research.

Status: The Electron Beam Evaporator, as well as the Plasma Etching and Annealing Module, are available by request through the proposal process.