Ming Lu

Brookhaven National Laboratory

Center for Functional Nanomaterials
Bldg. 735, Room 1044
P.O. Box 5000
Upton, NY 11973-5000

(631) 344-4773
mlu@bnl.gov

Pronouns: he, him, his

Expertise | Research | Education | Appointments | Publications | Highlights | Awards

Expertise

• e-beam lithography and photolithography
• Reactive ion etch
• Scanning electron microscopy
• Thin film deposition
• Optical algorithms (Fourier optics, Thin film optics, FDTD method)
• X-ray optics

Research Activities

My research focuses on the exploration of new methods and new materials for nanofabrication, especially for photonics and x-ray microscopy applications. Reliable processes have be established for fabricating high-aspect-ratio nano-structures, high-quality silicon photonic devices and novel metallic nanoslit waveguides. An e-beam lithography exposure algorithm was developed and commercialized to improve the fidelity of high-resolution curved patterns. Recent research interests include the performance improvement for lithography materials, and new plasma etch process development.  

Education

• Fudan University (Shanghai, China)   B.S. 1997 Physics

•  Fudan University (Shanghai, China)   M.S. 2000 Condensed Matter Physics

•  Stony Brook University, SUNY   Ph.D. 2006 Physics 

• Argonne National Laboratory   Postdoc 2009 Nanoscience 

Professional Appointments

• 2022 – Present   Research Staff, Center for Functional Nanomaterials, Brookhaven National Laboratory 

• 2009 – 2022   Scientific Associate, Center for Functional Nanomaterials, Brookhaven National Laboratory  

• 2013 – 2017   Adjunct Assistant Professor, Mechanical Engineering Department, Stony Brook University

• 2006 – 2009    Postdoctoral Appointee, Center for Nanoscale Materials, Argonne National Laboratory 

Selected Publications

• Xu W, Xu W, Bouet N, et al (2023) Machine-learning-based automatic small-angle measurement between planar surfaces in interferometer images: A 2D multilayer Laue lenses case. Optics and Lasers in Engineering 161:107331. https://doi.org/10.1016/j.optlaseng.2022.107331
• Yu S, Wu Y, Wang S, et al (2022) A High-Throughput MEMS-Based Differential Scanning Calorimeter for Direct Thermal Characterization of Antibodies. Biosensors 12:422. https://doi.org/10.3390/bios12060422
• Yu F, Hong W-C, Li G, et al (2021) Negative Capacitance MgZnO-Channel Thin-Film Transistor With Ferroelectric NiMgZnO in the Gate Stack. IEEE Electron Device Letters 42:355–358. https://doi.org/10.1109/led.2021.3052911
• Xu W, Xu W, Bouet N, et al (2020) Micromachined Silicon Platform for Precise Assembly of 2D Multilayer Laue Lenses for High-Resolution X-ray Microscopy. Micromachines 11:939. https://doi.org/10.3390/mi11100939
• Huang Y, Flor Flores JG, Li Y, et al (2020) A Chip-Scale Oscillation-Mode Optomechanical Inertial Sensor Near the Thermodynamical Limits. Laser & Photonics Reviews 14:. https://doi.org/10.1002/lpor.201800329
• Manfrinato VR, Camino FE, Stein A, et al (2019) Patterning Si at the 1 nm Length Scale with Aberration-Corrected Electron-Beam Lithography: Tuning of Plasmonic Properties by Design. Advanced Functional Materials 29:. https://doi.org/10.1002/adfm.201903429
• Overvig AC, Shrestha S, Malek SC, et al (2019) Dielectric metasurfaces for complete and independent control of the optical amplitude and phase. Light: Science & Applications 8:. https://doi.org/10.1038/s41377-019-0201-7
• Shrestha S, Overvig AC, Lu M, Stein A, Yu N (2018) Broadband achromatic dielectric metalenses. Light: Science & Applications. doi: 10.1038/s41377-018-0078-x
• Shi NN, Tsai C-C, Carter MJ, et al (2018) Nanostructured fibers as a versatile photonic platform: radiative cooling and waveguiding through transverse Anderson localization. Light: Science & Applications 7:. https://doi.org/10.1038/s41377-018-0033-x
• Li L, Bayn I, Lu M, Nam C-Y, Schröder T, Stein A, Harris NC, Englund D (2015) Nanofabrication on unconventional substrates using transferred hard masks. Scientific Reports. doi: 10.1038/srep07802

Research Highlights

• A Bright Future for Extreme UV Lithography at Brookhaven Lab
• Brookhaven Lab Researchers Win 2022 Microscopy Today Innovation Award
• Better Together: New 2D Multilayer Laue Lens Overcomes Alignment Challenge
• Nanoscale Mirrored Cavities Amplify, Connect Quantum Memories
• Diamond Detector Captures Last X-rays at NSLS
• Five Brookhaven Lab Projects Selected as R&D 100 Award Finalists
• Turning Up the Heat to Create New Nanostructured Metals
• Gold in Limbo Between Solid and Melted States

Awards & Recognition

• 2023 Brookhaven National Laboratory Spotlight Award 
• 2022 Microscopy Today Innovation Award (Microscopy Society of America): MEMS-based multilayer Laue lens for X-ray  
• 2020 Top 100 entry prize, Create the Future Design Contest (NASA Tech Briefs Magazine): Hybrid Organic-Inorganic Photoresists for Next-Generation Microelectronics  
• 2019 Brookhaven National Laboratory Spotlight Award  
• 2016 R&D 100 Award: Transparent Diamond X-ray Beam Position Monitors