General Lab Information

Ming Lu

Staff Scientist, Electronic Materials, Center for Functional Nanomaterials

Ming Lu

Brookhaven National Laboratory

Center for Functional Nanomaterials
Bldg. 735, Room 1044
P.O. Box 5000
Upton, NY 11973-5000

(631) 344-4773

Preferred Gender Pronouns (PGPs): he, him, his

Expertise | Research | Education | Appointments | Publications | Highlights | Awards


  • e-beam lithography and photolithography
  • Reactive ion etch
  • Scanning electron microscopy
  • Thin film deposition
  • Optical algorithms (Fourier optics, Thin film optics, FDTD method)
  • X-ray optics

Research Activities

My research focuses on the exploration of new methods and new materials for nanofabrication, especially for photonics and x-ray microscopy applications. Reliable processes have be established for fabricating high-aspect-ratio nano-structures, high-quality silicon photonic devices and novel metallic nanoslit waveguides. An e-beam lithography exposure algorithm was developed and commercialized to improve the fidelity of high-resolution curved patterns. Recent research interests include the performance improvement for lithography materials, and new plasma etch process development.  


  • Fudan University (Shanghai, China)   B.S. 1997 Physics

  •  Fudan University (Shanghai, China)   M.S. 2000 Condensed Matter Physics

  •  Stony Brook University, SUNY   Ph.D. 2006 Physics 

  • Argonne National Laboratory   Postdoc 2009 Nanoscience 

Professional Appointments

  • 2022 – Present   Research Staff, Center for Functional Nanomaterials, Brookhaven National Laboratory 

  • 2009 – 2022   Scientific Associate, Center for Functional Nanomaterials, Brookhaven National Laboratory  

  • 2013 – 2017   Adjunct Assistant Professor, Mechanical Engineering Department, Stony Brook University

  • 2006 – 2009    Postdoctoral Appointee, Center for Nanoscale Materials, Argonne National Laboratory 

Selected Publications

  • Xu W, Xu W, Bouet N, et al (2023) Machine-learning-based automatic small-angle measurement between planar surfaces in interferometer images: A 2D multilayer Laue lenses case. Optics and Lasers in Engineering 161:107331.
  • Yu S, Wu Y, Wang S, et al (2022) A High-Throughput MEMS-Based Differential Scanning Calorimeter for Direct Thermal Characterization of Antibodies. Biosensors 12:422.
  • Yu F, Hong W-C, Li G, et al (2021) Negative Capacitance MgZnO-Channel Thin-Film Transistor With Ferroelectric NiMgZnO in the Gate Stack. IEEE Electron Device Letters 42:355–358.
  • Xu W, Xu W, Bouet N, et al (2020) Micromachined Silicon Platform for Precise Assembly of 2D Multilayer Laue Lenses for High-Resolution X-ray Microscopy. Micromachines 11:939.
  • Huang Y, Flor Flores JG, Li Y, et al (2020) A Chip-Scale Oscillation-Mode Optomechanical Inertial Sensor Near the Thermodynamical Limits. Laser & Photonics Reviews 14:.
  • Manfrinato VR, Camino FE, Stein A, et al (2019) Patterning Si at the 1 nm Length Scale with Aberration-Corrected Electron-Beam Lithography: Tuning of Plasmonic Properties by Design. Advanced Functional Materials 29:.
  • Overvig AC, Shrestha S, Malek SC, et al (2019) Dielectric metasurfaces for complete and independent control of the optical amplitude and phase. Light: Science & Applications 8:.
  • Shrestha S, Overvig AC, Lu M, Stein A, Yu N (2018) Broadband achromatic dielectric metalenses. Light: Science & Applications. doi: 10.1038/s41377-018-0078-x
  • Shi NN, Tsai C-C, Carter MJ, et al (2018) Nanostructured fibers as a versatile photonic platform: radiative cooling and waveguiding through transverse Anderson localization. Light: Science & Applications 7:.
  • Li L, Bayn I, Lu M, Nam C-Y, Schröder T, Stein A, Harris NC, Englund D (2015) Nanofabrication on unconventional substrates using transferred hard masks. Scientific Reports. doi: 10.1038/srep07802

Research Highlights

Awards & Recognition

  • 2023 Brookhaven National Laboratory Spotlight Award 
  • 2022 Microscopy Today Innovation Award (Microscopy Society of America): MEMS-based multilayer Laue lens for X-ray  
  • 2020 Top 100 entry prize, Create the Future Design Contest (NASA Tech Briefs Magazine): Hybrid Organic-Inorganic Photoresists for Next-Generation Microelectronics  
  • 2019 Brookhaven National Laboratory Spotlight Award  
  • 2016 R&D 100 Award: Transparent Diamond X-ray Beam Position Monitors 
Ming Lu

Brookhaven National Laboratory

Center for Functional Nanomaterials
Bldg. 735, Room 1044
P.O. Box 5000
Upton, NY 11973-5000

(631) 344-4773

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