Ming Lu

Brookhaven National Laboratory

Center for Functional Nanomaterials
Bldg. 735, Room 1044
P.O. Box 5000
Upton, NY 11973-5000

(631) 344-4773
mlu@bnl.gov

Expertise | Research | Education | Appointments | Publications

Expertise

• e-beam lithography and photolithography
• Reactive ion etch
• Scanning electron microscopy
• Thin film deposition
• Optical algorithms (Fourier optics, Thin film optics, FDTD method)
• X-ray optics

Research Activities

My research focuses on the exploration of new methods and new materials for nanofabrication, especially for photonics and x-ray microscopy applications. Reliable processes have be established for fabricating high-aspect-ratio nano-structures, high-quality silicon photonic devices and novel metallic nanoslit waveguides. An e-beam lithography exposure algorithm was developed and commercialized to improve the fidelity of high-resolution curved patterns. Recent research interests include the performance improvement for lithography materials and new plasma etch process development.  

Education

• B.S. & M.S.: Fudan University, China
  • Physics Department
  • M.S. Thesis Title: Device Physics of Organic Light Emitting Diodes
• Ph.D.: Stony Brook University
  • Department of Physics and Astronomy
  • Dissertation Title: Nanofabrication of Fresnel zone plates for soft X-ray imaging at carbon edge

Professional Appointments

• Postdoctoral Research: Argonne National Laboratory
  • Center for Nanoscale Materials
  • Project: Metallic nano-slit waveguides

Selected Publications

• Huang Y, Flor Flores JG, Li Y, Wang W, Wang D, Goldberg N, Zheng J, Yu M, Lu M, Kutzer M, Rogers D, Kwong D, Churchill L, Wong CW (2020) A Chip-Scale Oscillation-Mode Optomechanical Inertial Sensor Near the Thermodynamical Limits. Laser & Photonics Reviews 14:1800329. doi: 10.1002/lpor.201800329
• Assefa TA, Cao Y, Banerjee S, Kim S, Kim D, Lee H, Kim S, Lee JH, Park S-Y, Eom I, Park J, Nam D, Kim S, Chun SH, Hyun H, Kim K sook, Juhas P, Bozin ES, Lu M, Song C, Kim H, Billinge SJL, Robinson IK (2020) Ultrafast x-ray diffraction study of melt-front dynamics in polycrystalline thin films. Science Advances 6:eaax2445. doi: 10.1126/sciadv.aax2445
• Chen XM, Mazzoli C, Cao Y, Thampy V, Barbour AM, Hu W, Lu M, Assefa TA, Miao H, Fabbris G, Gu GD, Tranquada JM, Dean MPM, Wilkins SB, Robinson IK (2019) Charge density wave memory in a cuprate superconductor. Nature Communications. doi: 10.1038/s41467-019-09433-1
• Manfrinato VR, Camino FE, Stein A, Zhang L, Lu M, Stach EA, Black CT (2019) Patterning Si at the 1 nm Length Scale with Aberration-Corrected Electron-Beam Lithography: Tuning of Plasmonic Properties by Design. Advanced Functional Materials 29:1903429. doi: 10.1002/adfm.201903429
• Shrestha S, Overvig AC, Lu M, Stein A, Yu N (2018) Broadband achromatic dielectric metalenses. Light: Science & Applications. doi: 10.1038/s41377-018-0078-x
• Yu S, Wang S, Lu M, Zuo L (2017) Review of MEMS differential scanning calorimetry for biomolecular study. Frontiers of Mechanical Engineering 12:526–538. doi: 10.1007/s11465-017-0451-0
• Li Z, Kim M-H, Wang C, Han Z, Shrestha S, Overvig AC, Lu M, Stein A, Agarwal AM, Loncar M, Yu N (2017) Controlling propagation and coupling of waveguide modes using phase-gradient metasurfaces. Nature Nanotechnology 12:675–683. doi: 10.1038/nnano.2017.50
• Pan Y, Lu M, Jeon J (2016) Organic Relay Carry Generator and Logic Gates. IEEE Electron Device Letters 37:1351–1353. doi: 10.1109/led.2016.2600257
• Li L, Bayn I, Lu M, Nam C-Y, Schröder T, Stein A, Harris NC, Englund D (2015) Nanofabrication on unconventional substrates using transferred hard masks. Scientific Reports. doi: 10.1038/srep07802
• Hsieh P, Chung C, McMillan JF, Tsai M, Lu M, Panoiu NC, Wong CW (2015) Photon transport enhanced by transverse Anderson localization in disordered superlattices. Nature Physics 11:268–274. doi: 10.1038/nphys3211
• Johnston DE (2012) Plasma etch transfer of self-assembled polymer patterns. Journal of Micro/Nanolithography, MEMS, and MOEMS 11:031306. doi: 10.1117/1.jmm.11.3.031306
• Hodges JS, Li L, Lu M, Chen EH, Trusheim ME, Allegri S, Yao X, Gaathon O, Bakhru H, Englund D (2012) Long-lived NV−spin coherence in high-purity diamond membranes. New Journal of Physics 14:093004. doi: 10.1088/1367-2630/14/9/093004
• Tan J, Lu M, Stein A, Jiang W (2012) High-purity transmission of a slow light odd mode in a photonic crystal waveguide. Optics Letters 37:3189. doi: 10.1364/ol.37.003189
• Yan H, Rose V, Shu D, Lima E, Kang HC, Conley R, Liu C, Jahedi N, Macrander AT, Stephenson GB, Holt M, Chu YS, Lu M, Maser J (2011) Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses. Optics Express 19:15069. doi: 10.1364/oe.19.015069
• Lu M, Ocola LE, Gray SK, Wiederrecht GP (2008) Fabrication of metallic nanoslit waveguides with sharp bends. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 26:2151–2155. doi: 10.1116/1.3013398
• Lu M, Tennant DM, Jacobsen CJ (2006) Orientation dependence of linewidth variation in sub-50-nm Gaussian e-beam lithography and its correction. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 24:2881. doi: 10.1116/1.2393292