General Lab Information

Chang-Yong Nam

Group Leader, Electronic Nanomaterials, Center for Functional Nanomaterials

Chang-Yong Nam

Brookhaven National Laboratory

Center for Functional Nanomaterials
Bldg. 735, Room 2022
P.O. Box 5000
Upton, NY 11973-5000

(631) 344-7066
cynam@bnl.gov

Dr. Chang-Yong Nam is a Senior Scientist (Research Staff 6) and the Leader of the Electronic Nanomaterials Group at the Center for Functional Nanomaterials (CFN) at Brookhaven National Laboratory (BNL). He is also an Adjunct Professor of Materials Science and Chemical Engineering at Stony Brook University, where he teaches a graduate course and advises graduate and undergraduate students. His research is focused on semiconductor materials processing, novel electronic devices & physics, and advanced patterning for next-generation microelectronics. Key areas include atomic layer processing (ALP)—including atomic layer deposition (ALD) and atomic layer etching (ALE)—as well as neuromorphic and low-dimensional materials and devices, and novel resist materials for extreme ultraviolet (EUV) lithography and beyond. He currently serves as the lead PI of the DOE Accelerate Initiative Award, "Angstrom Era Semiconductor Patterning Material Development Accelerator", an $8M project aimed at accelerating the development of next-generation EUV photoresists through vapor-phase materials synthesis and machine learning-driven correlation of proxy variables with ultimate EUV patterning performance.

Research | Education | Appointments | Publications | Highlights | Awards

Research Activities

  • Development and application of ALP techniques, including ALD, ALE, and vapor-phase infiltration (VPI) towards next-generation microelectronics (e.g., EUV lithography & advanced patterning, 3D integration, novel electronic devices) and energy technologies (membranes, catalysis etc.)
  • Materials and device physics in oxide, organic-inorganic hybrid, and low-dimensional semiconductors 
  • Application of self-assembled block copolymer (BCP) thin films 

Education

  • Ph.D., University of Pennsylvania, Philadelphia PA, 2007
    • Materials Science and Engineering; Dissertation Title: "Gallium Nitride Nanowires: Synthesis, Resonant Electromechanical Properties, Ion Beam Disorder Effect on Contact Conduction, and Heterojunction Fabrication";  Advisor: John E. Fischer 
  • M.S., Korea Advanced Institute of Science and Technology (KAIST), Daejon, South Korea, 2001
    • Materials Science and Engineering; Thesis Title: "Microstructure and Toughness of Nitrogen-Doped TiAl Alloys"; Advisor: Dang-Moon Wee
  • B.E., Korea University, Seoul, South Korea, 1999 
    • Metallurgical Engineering; Leave of Absence for Military Service in Republic of Korea Army (1995 – 1997)

Professional Appointments

  • Brookhaven National Laboratory, Center for Functional Nanomaterials
        Group Leader – Electronic Nanomaterials, 2025 – Present
        Senior Scientist, 2019 – Present (w/ Continuing Appointment)
        Scientist, 2016 – 2019 
        Associate Scientist, 2013 – 2016
        Assistant Scientist, 2010 – 2013
        Goldhaber Distinguished Fellow,  2007 – 2010
  • University of Texas at Dallas, Department of Materials Science and Engineering
        Adjunct Professor, 2023 – Present
  • Stony Brook University, Department of Materials Science and Chemical Engineering 
        Adjunct Professor, 2014 – Present
  • Korea Institute of Science and Technology (KIST), Materials Research Division
        Commissioned Researcher, 2001 – 2002

Selected Publications

  • Yang S, Lee DH, Weiland C, et al (2026) Monolithic Oxidation Enables Ultrathin Vertically Graded Tantalum Oxide for Low-Voltage, Low-Variability Memristive Switching. Advanced Functional Materials. https://doi.org/10.1002/adfm.77144
  • Lee DH, Yang S, Lee W-I, et al (2026) Ta Phase Engineering for Defect-Controlled Reliable Switching in Ultrathin TaOx Memristors. ACS Applied Materials & Interfaces 18:35599–35610. https://doi.org/10.1021/acsami.6c04830
  • Oh H, Wu Q, Park S, et al (2026) Small Molecule Inhibitor-Modulated Al2O3 Atomic Layer Deposition on Monolayer MoS2 for Controlled Nucleation. ACS Applied Materials & Interfaces 18:22552–22564. https://doi.org/10.1021/acsami.5c25914
  • Tiwale N, Subramanian A, Sikder S, et al (2026) Alumina Priming-Mediated Enhanced Binding of Diethylzinc with Carbonyl Groups in Poly(Methyl Methacrylate) during Vapor-Phase Infiltration. Chemistry of Materials 38:1751–1765. https://doi.org/10.1021/acs.chemmater.5c02584
  • Lee W-I, Le DN, Yen M, et al (2025) Molecular Layer Deposited Aluminum-Based Hybrid Resist for High-Resolution Nanolithography and Direct Ultra-High Aspect Ratio Pattern Transfer. Advanced Materials Technologies 11: https://doi.org/10.1002/admt.202501639
  • Hu L, Lee W-I, Chen K, et al (2025) Atomically Fine-Tuning Organic–Inorganic Carbon Molecular Sieve Membranes for Hydrogen Production. ACS Nano 19:4663–4671. https://doi.org/10.1021/acsnano.4c15126
  • Yin Y, Zhou Y, Fu S, et al (2024) Template-Assisted Growth of High-Quality α-Phase FAPbI3 Crystals in Perovskite Solar Cells Using Thiol-Functionalized MoS2 Nanosheets. ACS Nano 18:30816–30828. https://doi.org/10.1021/acsnano.4c11268
  • Yoo J, Nam C-Y, Bussmann E (2024) Atomic Precision Processing of Two-Dimensional Materials for Next-Generation Microelectronics. ACS Nano 18:21614–21622. https://doi.org/10.1021/acsnano.4c04908
  • Subramanian A, Tiwale N, Lee W-I, et al (2023) Vapor-Phase Infiltrated Organic–Inorganic Positive-Tone Hybrid Photoresist for Extreme UV Lithography. Advanced Materials Interfaces 10: https://doi.org/10.1002/admi.202300420
  • Yin Y, Zhou Y, Fu S, et al (2023) Enhancing Crystallization in Hybrid Perovskite Solar Cells Using Thermally Conductive 2D Boron Nitride Nanosheet Additive. Small 19: https://doi.org/10.1002/smll.202207092

Research Highlights

Awards & Recognition

Chang-Yong Nam

Brookhaven National Laboratory

Center for Functional Nanomaterials
Bldg. 735, Room 2022
P.O. Box 5000
Upton, NY 11973-5000

(631) 344-7066
cynam@bnl.gov

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