Chang-Yong Nam
Group Leader, Electronic Nanomaterials, Center for Functional Nanomaterials

Brookhaven National Laboratory
Center for Functional Nanomaterials
Bldg. 735
P.O. Box 5000
Upton, NY 11973-5000
(631) 344-7066
cynam@bnl.gov
Dr. Chang-Yong Nam is a Senior Scientist (Research Staff 6) and the Leader of the Electronic Nanomaterials Group at the Center for Functional Nanomaterials (CFN) at Brookhaven National Laboratory (BNL). He is also an Adjunct Professor of Materials Science and Chemical Engineering at Stony Brook University, where he teaches a graduate course and advises graduate and undergraduate students. His research is focused on semiconductor materials processing, novel electronic devices & physics, and advanced patterning for next-generation microelectronics. Key areas include atomic layer processing (ALP)—including atomic layer deposition (ALD) and atomic layer etching (ALE)—as well as neuromorphic and low-dimensional materials and devices, and novel resist materials for extreme ultraviolet (EUV) lithography and beyond. He currently serves as the lead PI of the DOE Accelerate Initiative Award, "Angstrom Era Semiconductor Patterning Material Development Accelerator", an $8M project aimed at accelerating the development of next-generation EUV photoresists through vapor-phase materials synthesis and machine learning-driven correlation of proxy variables with ultimate EUV patterning performance.
Research | Education | Appointments | Publications | Highlights | Awards
Research Activities
- Development and application of ALP techniques, including ALD, ALE, and vapor-phase infiltration (VPI) towards next-generation microelectronics (e.g., EUV lithography & advanced patterning, 3D integration, novel electronic devices) and energy technologies (membranes, catalysis etc.)
- Materials and device physics in organic, hybrid, and low-dimensional semiconductors
- Application of self-assembled block copolymer (BCP) thin films
Education
- Ph.D., University of Pennsylvania, Philadelphia PA, 2007
- Materials Science and Engineering; Dissertation Title: "Gallium Nitride Nanowires: Synthesis, Resonant Electromechanical Properties, Ion Beam Disorder Effect on Contact Conduction, and Heterojunction Fabrication"; Advisor: John E. Fischer
- M.S., Korea Advanced Institute of Science and Technology (KAIST), Daejon, Korea, 2001
- Materials Science and Engineering; Thesis Title: "Microstructure and Toughness of Nitrogen-Doped TiAl Alloys"; Advisor: Dang-Moon Wee
- B.E., Korea University, Seoul, Korea, 1999
- Metallurgical Engineering; Leave of Absence for Military Service in Republic of Korea Army (1995 – 1997)
Professional Appointments
- Brookhaven National Laboratory, Center for Functional Nanomaterials
Group Leader – Electronic Nanomaterials, 2025 – Present
Senior Scientist, 2019 – Present (w/ Continuing Appointment)
Scientist, 2016 – 2019
Associate Scientist, 2013 – 2016
Assistant Scientist, 2010 – 2013
Goldhaber Distinguished Fellow, 2007 – 2010 - University of Texas at Dallas, Department of Materials Science and Engineering
Adjunct Professor, 2023 – Present - Stony Brook University, Department of Materials Science and Chemical Engineering
Adjunct Professor, 2014 – Present - Korea Institute of Science and Technology (KIST), Materials Research Division
Commissioned Researcher, 2001 – 2002
Selected Publications
- Michelson A, Subramanian A, Kisslinger K, et al (2024) Three-dimensional nanoscale metal, metal oxide, and semiconductor frameworks through DNA-programmable assembly and templating. Science Advances 10:. https://doi.org/10.1126/sciadv.adl0604
- Hu L, Lee W-I, Subramanian A, et al (2024) Few-cycle atomic layer deposition to nanoengineer polybenzimidazole for H2/CO2 separation. Chemical Engineering Journal 479:147401. https://doi.org/10.1016/j.cej.2023.147401
- Subramanian A, Tiwale N, Lee W, et al (2023) Vapor-Phase Infiltrated Organic–Inorganic Positive-Tone Hybrid Photoresist for Extreme UV Lithography. Advanced Materials Interfaces. https://doi.org/10.1002/admi.202300420
- Yin Y, Zhou Y, Fu S, et al (2023) Enhancing Crystallization in Hybrid Perovskite Solar Cells Using Thermally Conductive 2D Boron Nitride Nanosheet Additive. Small 2207092. https://doi.org/10.1002/smll.202207092
- Subramanian A, Tiwale N, Kisslinger K, Nam C (2022) Reduced Stochastic Resistive Switching in Organic-Inorganic Hybrid Memristors by Vapor-Phase Infiltration. Advanced Electronic Materials 2200172. https://doi.org/10.1002/aelm.202200172
- Russell ST, Bae S, Subramanian A, et al (2022) Priming self-assembly pathways by stacking block copolymers. Nature Communications 13:. https://doi.org/10.1038/s41467-022-34729-0
- Zhou Y, Yin Y, Zuo X, et al (2021) Improving Thermal Stability of Perovskite Solar Cells by Suppressing Ion Migration Using Copolymer Grain Encapsulation. Chemistry of Materials 33:6120–6135. https://doi.org/10.1021/acs.chemmater.1c01675
- Yalin B, Liapis AC, Eisaman MD, et al (2021) Optical simulation of ultimate performance enhancement in ultrathin Si solar cells by semiconductor nanocrystal energy transfer sensitization. Nanoscale Advances 3:991–996. https://doi.org/10.1039/d0na00835d
- Tiwale N, Subramanian A, Dai Z, et al (2020) Large mobility modulation in ultrathin amorphous titanium oxide transistors. Communications Materials 1:. https://doi.org/10.1038/s43246-020-00096-w
- Liapis AC, Subramanian A, Cho S, et al (2020) Conformal Coating of Freestanding Particles by Vapor-Phase Infiltration. Advanced Materials Interfaces 7:2001323. https://doi.org/10.1002/admi.202001323
- Tiwale N, Subramanian A, Kisslinger K, et al (2019) Advancing next generation nanolithography with infiltration synthesis of hybrid nanocomposite resists. Journal of Materials Chemistry C 7:8803–8812. https://doi.org/10.1039/c9tc02974e
- Subramanian A, Doerk G, Kisslinger K, et al (2019) Three-dimensional electroactive ZnO nanomesh directly derived from hierarchically self-assembled block copolymer thin films. Nanoscale 11:9533–9546. https://doi.org/10.1039/c9nr00206e
- Wang L, Yan D, Shaffer DW, et al (2018) Improved Stability and Performance of Visible Photoelectrochemical Water Splitting on Solution-Processed Organic Semiconductor Thin Films by Ultrathin Metal Oxide Passivation. Chemistry of Materials 30:324–335. https://doi.org/10.1021/acs.chemmater.7b02889
- Li M, Chen J, Routh PK, et al (2018) Distinct Optoelectronic Signatures for Charge Transfer and Energy Transfer in Quantum Dot–MoS 2 Hybrid Photodetectors Revealed by Photocurrent Imaging Microscopy. Advanced Functional Materials 28:1707558. https://doi.org/10.1002/adfm.201707558
- Dusoe KJ, Ye X, Kisslinger K, et al (2017) Ultrahigh Elastic Strain Energy Storage in Metal-Oxide-Infiltrated Patterned Hybrid Polymer Nanocomposites. Nano Letters 17:7416–7423. https://doi.org/10.1021/acs.nanolett.7b03238
- Ye X, Kestell J, Kisslinger K, et al (2017) Effects of Residual Solvent Molecules Facilitating the Infiltration Synthesis of ZnO in a Nonreactive Polymer. Chemistry of Materials 29:4535–4545. https://doi.org/10.1021/acs.chemmater.7b01222
Research Highlights
- Meet the 2024 Science & Technology Award Recipients
- Brookhaven's Top 10 Discoveries of 2024
- Hacking DNA to Make Next-Gen Materials
- A Bright Future for Extreme UV Lithography at Brookhaven Lab
- Department of Energy Announces $73 Million for Basic Research to Accelerate the Transition from Discovery to Commercialization
- Scientists Build Nanoscale Parapets, Aqueducts, and Other Shapes
- Brookhaven Lab's Chang-Yong Nam Named a Battelle 'Inventor of the Year'
- Top-10 Areas of Amazing Science at Brookhaven Lab in 2021
- "Next-Gen Semiconductor Manufacturing Tech Wins DOE National Pitch Competition"
- Layered Graphene with a Twist Displays Unique Quantum Confinement in 2-D
- "Synthesis Method Expands Material Possibilities"
- "Understanding the Generation of Light-Induced Electrical Current in Atomically Thin Nanomaterials
Awards & Recognition
- Brookhaven Science & Technology Award, Brookhaven National Laboratory, 2024
- Work included in the Top 10 Discoveries of 2024 at Brookhaven Lab, 2024
- DOE Accelerate Initiative Award, Lead PI, "Angstrom Era Semiconductor Patterning Material Development Accelerator", US DOE, 2023
- Battelle Inventor of the Year, Battelle Memorial Institute / Brookhaven National Laboratory, 2022
- Work included in the Top-10 Areas of Amazing Science at Brookhaven Lab, 2021
- Winner, DOE National Labs Accelerator Pitch Event, Lawrence Livermore National Laboratory / UC Davis, 2021
- Spotlight Award, Brookhaven National Laboratory, 2022, 2018, 2011
- Goldhaber Distinguished Fellowship, Brookhaven National Laboratory, 2007 – 2010
- Graduate Research Fellowship, University of Pennsylvania, 2002 – 2007
- Brain Korea (BK) 21, Financial Award for Abroad Research, KAIST, 2001
- Korean Government Scholarship, KAIST, 1999 – 2001
- Merit-based Scholarship, Korea University, 1999

Brookhaven National Laboratory
Center for Functional Nanomaterials
Bldg. 735
P.O. Box 5000
Upton, NY 11973-5000
(631) 344-7066
cynam@bnl.gov