Optics Fabrication
- Development of multilayer Laue lenses (MLL) nanofocusing optics, driven by demonstrated theoretical capabilities of MLL for hard x-ray sub-10nm nanofocusing
- Bonding of the MLL Optics and Novel Positioning Techniques Using
MEMS Technology
Development in collaboration with the nanopositioning team - Deterministic polishing process based on ion beam figuring
Development in collaboration with the metrology team