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Dual Beam Scanning Electron/Focused Ion Beam Microscope

Facility NanofabricationCategory Lithography Full Catalog

Dual Beam Scanning Electron/Focused Ion Beam Microscope (FEI Helios), capable of simultaneous focused ion beam milling and SEM imaging. Further capabilities are: in-situ electrical measurements, high-resolution electron-beam and ion-beam lithography, gas injector for electron or ion beam assisted deposition of platinum or TEOS insulator, x-ray detector for EDS analysis, nano-manipulator probe; and high resolution SEM (1 nm), FIB (5 nm), and STEM (0.8 nm) imaging.

Manufacturer: FEI Helios Dual Beam