Equipment Catalog

The JEOL JSM-7600F is a state-of-the-art thermal FE-SEM combining high resolution imaging with optimized analytical functionality. It counts with beam deceleration for imaging charging samples and includes an array of secondary electron, conventional and low-angle backscattered electron, and STEM detectors. For analytical work, the SEM is equipped with Oxford Instruments’ energy dispersive spectroscopy (EDS) and wavelength dispersive spectroscopy (WDS) detectors. The tool has a probe current as high as 200 nA (at 15 kV) for analytical purposes.