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Scanning Transmission Electron Microscope (STEM)

Facility Electron MicroscopyCategory Electron Microscopy Full Catalog

The Hitachi 2700C is a dedicated Scanning Transmission Electron Microscope (STEM), operating at 80, 120 and 200 kV. It has a probe aberration-corrector, which improves imaging spatial resolution to less than 1Å. The energy resolution for electron energy loss spectroscopy (EELS) can be as small as 0.35 eV, due to its cold field emission electron gun (FEG) and the presence of a high-resolution parallel EELS detector (Gatan Enfina-ER). This instrument is ideal for probing structural and electronic properties of materials at the Angstrom level, allowing on to study the physical, chemical and electronic structure of oxide interfaces, catalysts and other functional nanomaterials. Notably, this Hitachi STEM has a secondary electron microscopy (SEM) detector for high resolution SEM imaging of the particles on the surface, with atomic resolution imaging have been demonstrated in the SEM imaging mode.

This instrument also has electron-beam lithography capabilities for patterning arbitrary structures with unprecedented single digit nanometer resolution. Since at this length scale quantum effects become dominant, this capability opens the possibility of discovering and engineering novel electrical, optical, and thermal properties of materials.

Manufacturer: Hitachi HD 2700C