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Equipment Catalog

Physical Vapor Sputter/Thermal Evaporator

Facility Materials Synthesis and CharacterizationCategory Deposition (Evaporators/Sputterers/Pecvd/Coaters) Full Catalog

This thin film deposition system (Kurt J. Lesker PVD75) is used for the synthesis of inorganic thin films by thermal evaporation and DC magnetron sputtering (e.g., metals for electrical contacts and a number of metal oxides). The tool is equipped with a substrate heater and an argon ion mill.

Manufacturer: Kurt J. Lesker PVD75