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Equipment Catalog
Physical Vapor Sputter/Thermal Evaporator
Materials Synthesis and CharacterizationCategory: Deposition (Evaporators/Sputterers/Pecvd/Coaters) Full Catalog
This thin film deposition system (Kurt J. Lesker PVD75) is used for the synthesis of inorganic thin films by thermal evaporation and DC magnetron sputtering (e.g., metals for electrical contacts and a number of metal oxides). The tool is equipped with a substrate heater and an argon ion mill.
Manufacturer: Kurt J. Lesker PVD75
