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Pulsed Laser Deposition System PLD/MBE 2300

Facility Materials Synthesis and CharacterizationCategory Deposition (Evaporators/Sputterers/Pecvd/Coaters) Full Catalog

The pulsed laser deposition system (PVD Products PLD-MBE 2300) is used for synthesis of complex metal oxides or nitride thin-films by laser ablation.  The tool is equipped with a 248 nm KrF excimer laser (Lambda Physik COMPex PRO 102) that operates at repetition rates up to 20 Hz with 400 mJ per pulse for a maximum power output of 6 watts.  The tool features a programmable 6-position target manipulator and supports radiative, non-contact substrate heating up to 950 ºC.  This capability was added to the facility during FY2015.

Manufacturer: PVD Products