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Equipment Catalog

Thermal Atomic Layer Deposition (ALD)

Facility: Materials Synthesis and CharacterizationCategory: Deposition (Evaporators/Sputterers/Pecvd/Coaters) Full Catalog

Vecco Savannah S200 is a thermal atomic layer deposition (ALD) system equipped with an integrated quartz microbalance, 8-inch sample chamber, and 6-precusor manifold. It is capable of ultrathin, conformal coatings of high-quality dielectric materials and electroactive metal oxides, and also supports the vapor-phase infiltration synthesis of organic-inorganic hybrid materials.

Manufacturer: Veeco Savannah S200

Equipment Catalog

Thermal Atomic Layer Deposition (ALD)

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