BNL Home

Equipment Catalog

Atomic Layer Deposition Tool (ALD) Savannah S100

Facility Materials Synthesis and CharacterizationCategory Deposition (Evaporators/Sputterers/Pecvd/Coaters) Full Catalog

The tool (Cambridge Nanotech Savannah100) includes precursors for atomically precise growth of thin films of Al2O3, ZnO, TiO2, VOx, HfO2, and Pt, at growth temperatures as high as 300 °C. The system is also equipped with a portable quartz crystal microbalance (QCM, Colnatec Tempe) designed for in-situ thickness/mass loading measurements during film growth. The QCM capability was added to the system during 2015, and the HfO2 capability was added in 2016.  This instrument is heavily used, with considerable evening and weekend use.

Manufacturer: Ultratech Savannah S100

Silver system (right)