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Equipment Catalog

Helios G5 Dual Beam SEM/FIB Microscope

Facility: NanofabricationCategory: Electron MicroscopyLithography Full Catalog

The Thermo Fisher Scientific Helios G5 UX SEM/FIB has excellent electron- and ion-beam imaging resolutions allowing the fabrication of TEM samples with unprecedented quality, especially when combined with its incorporated low energy Ar ion milling capability. Additional capabilities are: EDS and EBSD detectors, low-T slice-and-view for 3D reconstruction of materials, robotic nanomanipulators for in-situ electrical probing, e-beam and ion-beam lithography, in-situ device fabrication, and fully automatic TEM sample preparation procedures.

Manufacturer: Thermo Fisher Scientific