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Equipment Catalog
Plasma Etching and Annealing Module (QPress)
Materials Synthesis and CharacterizationCategory: Thermal Analysis, Annealing and ElectrochemistryEtching and Ashing2D Material Handing Full Catalog
The QPress cluster includes a plasma etching/annealing module. The plasma etching operates at power levels of up to 100 W, while the annealing process can reach temperatures of up to 800°C. These processes can be performed in argon, nitrogen, oxygen, or a mixture of these gases, or under vacuum for annealing.
Manufacturer: Kurt J. Lesker
