Equipment Catalog

The ZEISS Crossbeam FIB/SEM combines high-resolution SEM imaging with precise FIB milling for advanced nanoscale characterization and sample preparation. The SEM operates from approximately 0.02–30 kV (depending on configuration), while the gallium ion beam typically ranges from 0.5–30 kV with beam currents up to 100 nA. The system features volume tomography (3nm) with 3D EDS, a STEM detector for transmission imaging, and a quick-exchange load lock for rapid sample transfer and improved throughput.