BNL Home

Equipment Catalog

Plasma Enhanced Chemical Vapor Deposition (PECVD) System

Facility NanofabricationCategory Deposition (Evaporators/Sputterers/Pecvd/Coaters) Full Catalog

This deposition system (Trion Orion III) provides plasma-enhanced chemical vapor deposition of thin films. Current capabilities include precursor gases for deposition of SiO2, Si3N4, and amorphous silicon films.

Manufacturer: Trion Orion III