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Equipment Catalog
Plasma Enhanced Chemical Vapor Deposition (PECVD) System
NanofabricationCategory: Deposition (Evaporators/Sputterers/Pecvd/Coaters) Full Catalog
This deposition system (Trion Orion III) provides plasma-enhanced chemical vapor deposition of thin films. Current capabilities include precursor gases for deposition of SiO2, Si3N4, and amorphous silicon films.
Manufacturer: Trion Orion III