General Lab Information

Equipment Catalog

Electron Beam Lithography Tool (EBL)

Facility: NanofabricationCategory: Lithography Full Catalog

The JEOL JBX-6300FS is a state-of-the-art 100kV EBL tool providing high-speed patterning capabilities with feature sizes as small as 8 nm over mm-scale areas.

Manufacturer: JEOL JBX6300FS