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Equipment Catalog
Electron Beam Lithography Tool (EBL)
NanofabricationCategory: Lithography Full Catalog
The JEOL JBX-6300FS is a state-of-the-art 100kV EBL tool providing high-speed patterning capabilities with feature sizes as small as 8 nm over mm-scale areas. The system provides capability of high-speed, large-area exposures (1mm field size) and sub-20 nm overlay and stitching accuracy. The system can handle sample substrates from 5mm up to 3” or 4” wafers, as well as 4” photomasks.
Manufacturer: JEOL JBX6300FS
