General Lab Information

Equipment Catalog

Dektak 150 Stylus Profilometer

Facility: NanofabricationCategory: Thin Film Metrology Full Catalog

Single scan contact profilometer with a scan length range 50 um to 55 mm and a sub 1 nm specified vertical resolution.

Manufacturer: Dektak 150

Location: Cleanroom

Lab Phone: (631) 344-4335