Nanofabrication Group

CFN Home | Cleanroom Overview (pdf) | Electrical Characterization Laboratory

• Cleanroom Tool Status and tool related information
• Facility Online Manager (FOM) website
• FOM manual
• Cleanroom Experimental Safety Review (ESR) 7: nanopatterning and characterization
• Cleanroom ESR 8: thin film processing
• Cleanroom ESR 30: Oxford Reactive Ion Etcher-C
• CFN Operations Safety Awareness (COSA) form for cleanroom
• Cleanroom Orientation/Protocols
• Electronic Chemical Recipe/Waste Log instructions

Last Modified: January 18, 2012
Please forward all questions about this site to: Fernando Camino.

One of ten national laboratories overseen and primarily funded by the Office of Science of the U.S. Department of Energy (DOE), Brookhaven National Laboratory conducts research in the physical, biomedical, and environmental sciences, as well as in energy technologies and national security. Brookhaven Lab also builds and operates major scientific facilities available to university, industry and government researchers. Brookhaven is operated and managed for DOE's Office of Science by Brookhaven Science Associates, a limited-liability company founded by the Research Foundation of State University of New York on behalf of Stony Brook University, the largest academic user of Laboratory facilities, and Battelle, a nonprofit, applied science and technology organization.

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