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Equipment Catalog
Electron Beam Evaporator Module (QPress)
Materials Synthesis and CharacterizationCategory: Deposition (Evaporators/Sputterers/Pecvd/Coaters)2D Material Handing Full Catalog
An electron beam evaporator module enables the physical vapor deposition of thin films of various materials onto samples on 3" wafers. An electron beam is used to heat up and volatilize target materials contained within a crucible at pressures in the range of 5E-6 Torr or lower. Six pockets are available for depositing different materials.
Manufacturer: Kurt J. Lesker