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Thin-Film Processing

• Facility Online Manager (FOM) website
• FOM manual
• ESR for lab 1L32 (High-Resolution SEM and x-ray microanalysis)
• CFN Operations Safety Awareness (COSA) form for 1L32 (ESR #1)
• Technical article on LABE detector (Analytical SEM)
• Request form for off-hours access (.doc, First time only, renewals done via email)

booking calendar: yes = need to reserve tool time in calendar before using tool
booking rules: yes = specific rules exist for reserving tool time
SOP = standard operating procedure (basic instructions)